Brooks-instrument Mfi Series Bedienungsanleitung PDF herunterladen (Seite 7)

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Brooks

Mf Series

Contents

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Tables

Table Page

Number Number

1-1 Flow Ranges ..............................................................................................................................1-2

1-2 Power Requirements..................................................................................................................1-4

1-3 Mf Series Controllers and Meters Terminal Strip Hookup ..........................................................1-5

2-1 Recommended Filter Size ..........................................................................................................2-3

4-1 Bench Troubleshooting ..............................................................................................................4-3

4-2 Sensor Troubleshooting .............................................................................................................4-4

4-3 Mf Series Torque Requirements................................................................................................4-10

4-4 Orifice Capacities ......................................................................................................................4-16

4-5 Conversion Factor( Nitrogen Base)...........................................................................................4-19

4-6 Model Mf50/60 Series Standard Restrictors..............................................................................4-22

4-7 Model Mf51/61 Restrictor Selection Guide................................................................................4-24

5-1 Mf Series Common Replacement Parts.....................................................................................5-5

5-2 Model Mf50/60 Replacement Parts ............................................................................................5-6

5-3 Model Mf51/61 Replacement Parts ............................................................................................5-7

5-4 Model Mf53/63 Replacement Parts ............................................................................................5-8

5-5 Mf Series Tool and Spare Part Kits.............................................................................................5-9

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Brooks-instrument Mfi Series Bedienungsanleitung Seite 7