Brooks-instrument Mfi Series Bedienungsanleitung PDF herunterladen (Seite 14)

1-6

Brooks

®

Mf Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure 1-4 Mf Series Typical Hookup to Brooks 0151i Power Supply

Figure 1-3 Terminal Strip Labeling

TB-1

ICMD

NC

GND

VCMD

CMDCOM

NC

VOR

VREF

VSUP+

SUPCOM

NC

SIGCOM

VSIG

TB-3

TB-2

ISIG

NC

VALVE

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