Brooks-instrument Mfi Series Bedienungsanleitung PDF herunterladen (Seite 63)

4-25

Brooks

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure 4-5 Model Mf51/61 Restrictor Element Orientation in Controller/Meter Body

4-7 Orifice Sizing

Orifice sizes for all Mf controllers should be sized using the "Brooks

Thermal Mass Flowmeter Sizing Selection Program" Revision 8.6 or later.

A copy can be requested through your local Brooks Sales Representative

or through the Brooks Customer Service Department.

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Brooks-instrument Mfi Series Bedienungsanleitung Seite 63