Brooks-instrument Mfi Series Bedienungsanleitung PDF herunterladen (Seite 47)

4-9

Brooks

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure 4-2 Voltmeter Connections for Valve Adjustment

17.For Mf51/61, remove the four screws from the end block and carefully

remove the end block.

B. Assembly (Mfx Series sensor assembly is not removable)

Note: It is recommended that all service O-rings be replaced during

instrument assembly. All service O-rings should be lightly lubricated with

Fomblin lubricant (part of service O-ring kit, Section 5) prior to their

installation.

Note: Torque valves for all critical fasteners are listed in Table 4-3.

1. Examine all parts for signs of wear or damage, replace as necessary.

2. Place the restrictor O-ring on the restrictor assembly. Screw the

restrictor assembly into the inlet side of the flow controller body using

the restrictor tool, tighten hand tight.

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Brooks-instrument Mfi Series Bedienungsanleitung Seite 47