Brooks-instrument SLAMf Series Bedienungsanleitung PDF herunterladen (Seite 6)

Brooks

Digital MFC's & MFM's

Contents Installation and Operation Manual

X-TMF-SLAMf-MFC-eng

Part Number: 541B032AAG

April, 2013

Section 4 Maintenance & Troubleshooting

4-1 Maintenance and Troubleshooting .............................................................................................4-1

4-1-1 System Checks ..........................................................................................................................4-2

4-1-2 Cleaning Procedures..................................................................................................................4-5

4-1-3 Calibration Procedure ................................................................................................................4-5

Section A Essential Instructions.............................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figures

Figure Page

Number Number

1-1 Open Collector Alarm Output. ....................................................................................................1-6

1-2 General Wiring ...........................................................................................................................1-6

1-3 Response Performance of Brooks Digital MFC .........................................................................1-7

1-4 Linear Ramp-up or Ramp-down from 200% per Second to 0.5% per Second Setpoint Change .....1-8

1-5 Analog, DeviceNet and FOUNDATION Fieldbus Terminal Layouts.................................................1-12

1-6 Model SLAMf50D Digital I/O DeviceNet MFC ............................................................................1-13

1-7 Model SLAMf50F Digital I/O FOUNDATION Fieldbus MFC .............................................................1-13

1-8 Model SLAMf51 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)...............................................1-14

1-9 Model SLAMf53 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)...............................................1-14

1-10 Model SLAMf60 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)...............................................1-15

1-11 Model SLAMf61 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)...............................................1-15

1-12 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)...............................................1-16

1-13 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) with Flanged Connections........1-16

2-1 Analog I/O Pin Connctions, Top View Uncovered .......................................................................2-6

2-2 Common Electrical Hookups, Voltage I/O Version ......................................................................2-6

2-3 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ............2-7

2-4 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) ....................2-7

2-5 RS485 Multidrop Interconnection TMFs and PC.........................................................................2-8

3-1 Flow Sensor Operational Diagram (VCR

End Connections Shown) ........................................3-4

3-2 Externally Accessable Adjustment for all Meters/Controllers ......................................................3-4

4-1 Bench Troubleshooting Circuit ....................................................................................................4-3

Tables

Table Page

Number Number

1-1 Flow Ranges and Pressure Ratings...........................................................................................1-3

1-2 Calibration Select Signal ............................................................................................................1-8

1-3 Analog I/O Pin Connections .......................................................................................................1-8

2-1 Recommended Filter Size..........................................................................................................2-3

3-1 Typical Resistor Values for Calibration Selection .......................................................................3-5

4-1 Sensor Troubleshooting .............................................................................................................4-5

4-2 Troubleshooting..........................................................................................................................4-6

1 2 3 4 5 6 7 8 9 10 11 ... 75 76

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