Brooks-instrument SLAMf Series Bedienungsanleitung PDF herunterladen (Seite 14)

1-8

Section 1 - Introduction

Installation and Operation Manual

X-TMF-SLAMf-MFC-eng

Part Number: 541B032AAG

April, 2013Brooks

Digital MFC's and MFM's

Figure 1-4 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to

0.5 % Per Second Setpoint Change

DEFAULT = CAL# 1 (External resistor not installed)

CAL Resistor Value (k ohms) CAL Resistor Value (k ohms)

1 Not Installed 6 124

2 Shorted 7 80.6

3 665 8 52.3

4 324 9 30.9

5 191 10 15

Table 1-3 Analog I/O Pin Connections:

Table 1-2 Calibration Select Signal

Function PIN

Setpoint, Common Input (-) 1

Flow Signal, 0(1) -5 volt, Output (+) 2

TTL Alarm, open collector, Output (+) 3

Flow Signal, 0(4)-20 mA, Output (+) 4

Power Supply, +13.5 Vdc to +27 Vdc(+) 5

Not Connected 6

Setpoint, 0(4)-20 mA, Input (+) 7

Setpoint, 0(1)-5 Vdc, Input (+) 8

Power Supply, Common (-) 9

Flow Signal, Common, Output, (-) 10

Reference, +5 Vdc, Output (+) 11

Valve Override, Input 12

Calibration Select Input 13

RS-485 Common B (-) 14

RS-485 Common A (+) 15

1 2 ... 9 10 11 12 13 14 15 16 17 18 19 ... 75 76

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Brooks-instrument SLAMf Series Bedienungsanleitung Seite 14